| 摘要 |
PROBLEM TO BE SOLVED: To stably take a substrate out of a substrate storage part by preventing the state where an insertion paper sheet is deposited to a bottom face of the substrate.SOLUTION: In a substrate supply device 100 comprising a substrate storage part 110 and a substrate hand 120, the substrate hand 120 includes, at positions corresponding to opposite two sides of a substrate 104, one or more adsorption pads 122 for adsorbing the substrate 104 and one or more blow nozzles 124 disposed adjacently to the adsorption pads 122 for blowing gas from a hole 104A provided on the substrate 104. The substrate supply device 100 comprises a control part 146 in which, in the state where the substrate 104 disposed on an uppermost surface of a laminate 102 is adsorbed by the adsorption pads 122, the substrate hand 120 is moved upwards and at least the blow nozzle 124 is caused to blow gas pressing an insertion paper sheet 106 disposed on a bottom face of the substrate 104 against the laminate 102 from the state where the adsorption pads 122 adsorb the substrate 104 to the state where the substrate 104 is separated from the laminate 102 by a predetermined distance. |
