| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a dry vacuum pump device that can restrain poor lubrication from being caused by sucking/exhausting gas containing moisture.SOLUTION: A dry vacuum pump device 100 comprises: a pump rotor 300 that includes a pair of rotors arranged oppositely and sucks/exhausts gas by using synchronous rotation of the pair of rotors; and a canned motor part 200 that drives a pump shaft 310 for rotating the rotors. In addition, the dry vacuum pump device 100 comprises a first seal mechanism 390 that is provided around the pump shaft 310 between the pump rotor 300 and the canned motor part 200 and seals a clearance between the pump rotor 300 and the canned motor part 200.</p> |
