| 摘要 |
The present invention provides a calibration method of an encoder, which includes a scale and an optical receiver unit formed to receive light reflected by the scale, and detects changes in the relative position between the scale and the optical receiver unit. The calibration method comprises a measuring step of measuring deformation of the surface shape of the scale; a defining step of including a part of the surface of the scale, in which the deformation exceeds the critical value based on the measured result of the measuring step, and defining a range to calibrate the detected value of the encoder; and a determining step of determining the calibration value for calibrating the detected value of the encoder within the range defined at the defining step. |
