CRUCIBLE MATERIAL AMOUNT DETECTION DEVICE AND METHOD, AND VAPOR DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a crucible material amount detection device capable of accurately detecting the amount of a material left in a crucible.SOLUTION: There are a crucible material amount detection device and method, and a vapor deposition apparatus. The crucible material amount detection device includes: a weighing module which includes a plurality of sensors installed at the bottom part of a crucible and detects the weight of the crucible; an arithmetic module which receives detection data transmitted from the sensors and calculates the amount of a remaining material in the crucible; and a control module which compares the amount of the remaining material calculated by the arithmetic module with a set amount of the remaining material, and sends a control command when the calculated amount of the remaining material is smaller than the set amount of the remaining material. Consequently, the amount of the remaining material in the crucible can be accurately detected.