FILM FORMATION METHOD, AND FILM FORMATION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve a film quality, since the film quality is deteriorated by radiation heat emitted from a film formation material supplier.SOLUTION: In a film formation method for forming a film on a substrate by supplying a film formation material from a film formation material supplier onto the substrate in the state where the substrate is mounted on a pedestal, a film quality can be improved by providing a shield plate having an opening part for allowing the film formation material to pass therethrough between the substrate and the film formation material supplier.