| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a defect correction method in which, even when film thickness of an electrode is thick and width of the electrode and a space between electrodes are narrow can be stably corrected in a short time.SOLUTION: In this defect correction method, correction liquid 53 is coated at respective ends on disconnection defect part 52 side of electrodes 51a, 51b by using a coating needle 1 whose coating diameter is larger than the width of an electrode 51, and the correction liquid 53 is coated between the ends of the electrodes 51a, 51b by using a coating needle 2 whose coating diameter is the almost same as the width of the electrode 51. A width Wa of the correction liquid 53 at the end (A part) of the electrode 51a, a width Wb of the correction liquid 53 at the end (B part) of the electrode 51b, and a width W of the electrode 51 can be made to have the almost same width.</p> |
