THIN FILM DEPOSITION APPARATUS AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME

摘要

Provided are a thin film deposition apparatus and a method of manufacturing an organic light emitting diode display using the same. A thin film deposition apparatus includes a crucible assembly which deposits an organic material towards a substrate, and a pattern mask located at a side of the substrate facing the crucible assembly. The crucible assembly includes a crucible which is combined with a heater and contains an organic material, and a guide pipe which forms an interior space which is extended from the inlet of the crucible to the substrate.