| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an alignment device capable of favorably aligning even a translucent plate-like object held via a screen mesh.SOLUTION: The alignment device for aligning the translucent plate-like object having translucency includes: a holding mechanism for holding the translucent plate-like object via the screen mesh; an alignment camera disposed at a side holding the translucent plate-like object of the screen mesh; a reflection illumination disposed at the side holding the translucent plate-like object of the screen mesh; and a transillumination disposed at an opposite side of the side holding the translucent plate-like object of the screen mesh.</p> |
