| 摘要 |
<p>A display cell inspection device includes electronic and optical inspection modules which conduct an inspection operation to check the electronic and optical properties of the display cells formed on a substrate; a thickness inspection module which conducts a thickness inspection operation for the material layers constituting the display cells; and a substrate transfer module which connects the electronic and optical inspection modules, the thickness inspection module, and an in-line process apparatus used to form the display cells on the substrate to transfer the substrate between the in-line process apparatus, optical inspection modules, and thickness inspection module.</p> |
