光学构件、投影光学系统、曝光装置以及元件制造方法;OPTICAL ELEMENT, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

光学元件包括：基材；多层膜，配置于基材上，积层有多个单元积层构造，该单元积层构造具有第一层与配置于第一层上的第二层；及多个隔片层，配置于单元积层构造彼此的层间中的互不相同的层间。; a multi-layer membrane disposed on the base material and laminated with a plurality of unit laminated structures, wherein the unit laminated structures includes a first layer and a second layer disposed on the first layer; and a plurality of spacing layers disposed in different interlaminars among interlaminars between the respective unit laminated structures.