发明名称 NON-CONTACT MANIPULATING DEVICES AND METHODS
摘要 Non-contact manipulating devices and methods can include a fluid distribution member including a first fluid port configured to dispense fluid and create a Bernoulli effect to attract an article to be manipulated by the manipulating device while maintaining a gap between the article and the fluid distribution member. The fluid distribution member can further include a second fluid port configured to dispense fluid to assist in maintaining the gap. The non-contact manipulating devices and methods can further include a controller configured to control a fluid flow through at least the second fluid port to help maintain the gap.
申请公布号 KR101483406(B1) 申请公布日期 2015.01.16
申请号 KR20147018880 申请日期 2009.08.26
申请人 发明人
分类号 B25J15/06;B65G49/07;H01L21/677;H01L21/683 主分类号 B25J15/06
代理机构 代理人
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