| 摘要 |
此揭露是有关于一种纯化聚合物的方法。该方法包括(a)提供一有机溶液，其含有在至少一极性非质子性的聚合反应溶剂中之一聚醯亚胺或聚醯胺酸酯；(b)加入至少一纯化溶剂至该有机溶液以形成一稀释的有机溶液，该至少一纯化溶剂的极性比该至少一聚合反应溶剂的极性来得小，并且在25℃的温度下，比该至少一聚合反应溶剂具有一较低的水溶解度；(c)用水或一水性溶液清洗该稀释的有机溶液以得到一清洗的有机溶液；以及(d)移除于该清洗的有机溶液中之至少一部分的该至少一纯化溶剂，以得到一含有一纯化的聚醯亚胺或聚醯胺酸酯的溶液。此揭露亦有关于一种于一半导体基材上制备一薄膜的方法，以及相关的纯化聚合物溶液、薄膜及物件。; (b) adding at least one purification solvent to the organic solution to form a diluted organic solution, the at least one purification solvent is less polar than the at least one polymerization solvent and has a lower water solubility than the at least one polymerization solvent at 25℃; (c) washing the diluted organic solution with water or an aqueous solution to obtain a washed organic solution; and (d) removing at least a portion of the at least one purification solvent in the washed organic solution to obtain a solution containing a purified polyimide or polyamic ester. This disclosure also relates to a process of preparing a film on a semiconductor substrate, as well as related purified polymer solutions, films, and articles. |
