| 摘要 |
<p>In the present invention, provided is a slurry composition. According to the present invention, the slurry composition comprises polishing particles; a negative ion polymer dispersing agent with a carboxyl group; and an inhibitor for polishing oxide films wherein the inhibitor for polishing oxide films comprises dopamine and a dopamine group. In the present invention, the polishing particle includes at least one selected from a group consisting of metal oxides and organic materials or the metal oxide in colloidal state. In the configuration of the present invention, the slurry composition of the present invention is allowed to control the speed of polishing the oxide film according to the additive amount of the dopamine.</p> |
