发明名称 PROCEDE OPTIMISE DE FABRICATION DE NANOFILS ELECTROLUMINESCENTS
摘要 A process for fabricating an array of nanowires on the surface of a substrate, the nanowires comprising a portion capable of emitting radiation under action of an electrical or optical control and at least partially connected to one another electrically via a conductive upper layer, comprises steps allowing a subset of defective nanowires to be identified among active nanowires, the steps comprising: producing a layer of negative photoresist sensitive to the emission wavelength, covering the array of the nanowires; activating the array of the nanowires under electrical control or optical control so the active nanowires emit the radiation, the radiation decreasing the solubility of the negative resist; developing the resist level with the defective nanowires, leaving zones made less soluble and encircling the active nanowires; and removing the conductive layer above the defective nanowires. A process for fabricating one or more light-emitting diodes using the process is provided.
申请公布号 FR3000298(B1) 申请公布日期 2015.01.16
申请号 FR20120062474 申请日期 2012.12.20
申请人 ALEDIA 发明人 CAGLI CARLO
分类号 H01L33/20;B82Y40/00;H01L33/08 主分类号 H01L33/20
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