CHARGED PARTICLE BEAM DEVICE AND IMAGE STORAGE METHOD

摘要

PROBLEM TO BE SOLVED: To allow for selection and setting of minimum necessary data without applying excessive load to an external device such as a data management server according to the use of the external device such as the data management server or a type of a defect.SOLUTION: A method for processing image data of a sample acquired using a charged particle beam device, comprising: acquiring images of an observation object region of the sample in which a pattern is formed on a surface thereof for each of a plurality of detectors by picking up the images with a scanning electron microscope including the plurality of detectors; calculating a feature quantity of the acquired images of the observation object region and sorting the images on the basis of the calculated feature quantity of the images; and outputting the image selected from the images acquired for each of the plurality of detectors on the basis of predetermined conditions.