RUTHENIUM COMPLEX AND METHOD OF PRODUCING THE SAME, RUTHENIUM-CONTAINING THIN FILM AND METHOD OF MAKING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a ruthenium complex useful for making a ruthenium-containing thin film, and a method of producing the ruthenium complex.SOLUTION: This invention provides a ruthenium complex represented by formula (1), where R, R, R, R, R, R, Rand Rindependently represent a hydrogen atom or 1-6C alkyl group; and Rrepresents 1-6C alkyl group, excluding the cases where all of R, Rand Rare simultaneously a hydrogen atom and all of R, R, R, R, Rand Rare simultaneously a methyl group.