| 发明名称 |
Waveguide Structure |
| 摘要 |
A waveguide structure includes a bottom dielectric layer, a core layer disposed over the bottom dielectric layer, an etch stop layer disposed over the core layer, and a cladding layer or a buffer layer disposed over the etch stop layer. The waveguide structure is configured to guide a light signal through different geography, such as straight, taper, turning, grating and tight coupling sections. |
| 申请公布号 |
US2015016793(A1) |
申请公布日期 |
2015.01.15 |
| 申请号 |
US201313938730 |
申请日期 |
2013.07.10 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
Lee Wan-Yu;Kuo Ying-Hao;Bao Tien-I |
| 分类号 |
G02B6/02 |
主分类号 |
G02B6/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A waveguide structure, comprising:
a bottom dielectric layer; a core layer disposed over the bottom dielectric layer; an etch stop layer disposed over the core layer; and a cladding layer disposed over the etch stop layer, wherein the waveguide structure is configured to guide a light signal. |
| 地址 |
HSIN-CHU TW |
