发明名称 PATTERNED THIN FILMS BY THERMALLY INDUCED MASS DISPLACEMENT
摘要 The described invention provides a method of patterning a thin film deposited on a substrate comprising applying a moving focused field of thermal energy to the thin film deposited on the substrate; and dewetting the thin film from the substrate. Dewetting the thin film from the substrate is characterized by a negative space of a desired design; and displacement of the thin film into adjacent structures, thereby accumulating thin film in the adjacent structures.
申请公布号 US2015014891(A1) 申请公布日期 2015.01.15
申请号 US201414202972 申请日期 2014.03.10
申请人 Amatucci Glenn G.;Ferrer Anthony 发明人 Amatucci Glenn G.;Ferrer Anthony
分类号 B23K26/00;B23K26/08 主分类号 B23K26/00
代理机构 代理人
主权项 1. A method of patterning a thin film deposited on a substrate comprising: (A) applying a moving focused field of thermal energy to the thin film deposited on the substrate; and (B) dewetting the thin film from the substrate, the dewetting being characterized by: (i) a negative space of a desired design; and(ii) displacement of the thin film into adjacent structures, thereby accumulating thin film in the adjacent structures.
地址 Peapack NJ US