METHOD OF SPECIMEN PROCESSING IN AN APPARATUS WITH TWO OR MORE PARTICLE BEAMS AND APPARATUS FOR THIS PROCESSING

摘要

The application deals with the method and apparatus for specimen processing in an apparatus with two or more particle beams, where the milled side (4.1 ) of the specimen is processed by the first particle beam and observed by the second particle beam. Specimen (4) is first milled by the first particle beam in the first position of the specimen and after this, the milled side (4.1 ) tilts in the second position around the axis (3) of the tilt of the specimen (4) where another milling is performed. Milling can also be performed during continuous tilting of the specimen (4) around the axis (3). The axis (3) of the tilt of the specimen (4) intersects the milled side (4.1 ). In all aforementioned positions of the specimen (4), the second particle beam impinges on the milled side (4.1 ), which enables to monitor the milling in real time.