| 摘要 |
The present invention has a plurality of first terminal parts (50a) for electrically connecting with a control circuit and disposed corresponding to a plurality of first electrode parts (36a), and first terminal wiring parts (44a) for electrically connecting the plurality of first electrode parts (36a) and the corresponding first terminal parts (50a). Each of the first terminal wiring parts (44a) has, in at least a portion (56) thereof falling in a circle (54) with a radius of 10 mm centering around a boundary part (52) between the first terminal wiring parts (44a) and the corresponding first terminal parts (50a), a portion having a line width of 5 µm to 100 µm inclusive, the wiring resistance value of the first terminal wiring parts (44a) connected to the first terminal parts (50a) being 100 ohms to 10 kohms inclusive. |
