| 摘要 |
<p>PURPOSE:To provide a stage device which can cope with the increase of the dimension of a stage and the positioning with high precision, reducing the frequency of maintenance. CONSTITUTION:A stage device is equipped with a stage 6, nut part 5 fixed with the stage 6, driving screw 1 which is held in a rotatable manner on a base plate 2 and is screwed with the nut part 5 and drives the stage 6 through the nut part 5, and the driving means 3 and 4 for applying a turning moment to the driving screw 1. A damping quantity adjusting means 10 which is arranged at least at one end of the driving screw 1 and ajusts the damping acting on the driving screw 1 during the shift of the stage 6 is installed.</p> |
