发明名称 METHOD FOR MANUFACTURING MOLECULAR MEMORY DEVICE
摘要 According to one embodiment, a method for manufacturing a molecular memory device includes: forming a first wiring layer including a plurality of first wirings extending in a first direction; forming a sacrificial film on the first wiring layer; forming a plurality of core members on the first wiring layer, the core member extending in a second direction crossing the first direction and being formed from an insulating material different from the sacrificial film; forming a second wiring on a side surface of the core member; removing a portion of the sacrificial film located immediately below the second wiring; embedding a polymer; and embedding an insulating. The embedding a polymer includes embedding a polymer serving as a memory material between the first wiring and the second wiring. The embedding an insulating member includes embedding an insulating member in a space between the second wirings between the core members.
申请公布号 US2015017760(A1) 申请公布日期 2015.01.15
申请号 US201414503483 申请日期 2014.10.01
申请人 Kabushiki Kaisha Toshiba 发明人 Yamashita Hiroki
分类号 G11C13/00;H01L27/28;H01L51/00;H01L51/05 主分类号 G11C13/00
代理机构 代理人
主权项
地址 Tokyo JP