| 主权项 |
1. A gate valve comprising:
a valve casing in which side walls facing each other are provided with a first opening connected to a process chamber and a second opening connected to a transfer chamber, and valve seat surfaces parallel to each other are formed around the openings; a valve assembly including a valve shaft having a distal end and a proximal end in the longitudinal direction, and plate-like first and second valve elements attached to the distal end of the valve shaft and having valve seal members corresponding to the valve seat surfaces; and an air cylinder a drive rod of which is connected to the valve shaft, wherein the valve assembly can be moved by the air cylinder from a fully opening position in which the valve elements are not opposite the openings, through a facing position in which the valve elements face the openings, to a first closing position in which the valve seal member of the first valve element is pressed against the valve seat surface around the first opening to close the first opening, and a second closing position in which the valve seal member of the second valve element is pressed against the valve seat surface around the second opening to close the second opening, wherein the gate valve has a connecting mechanism connecting the drive rod and the valve shaft such that they can be displaced relative to each other, a parallel movement mechanism moving the valve assembly parallel to the valve seat surfaces, a perpendicular movement mechanism moving the valve assembly perpendicularly to the valve seat surfaces, and a stopper mechanism that, when the valve assembly is moved from the fully opening position to the facing position by the parallel movement mechanism, stops the parallel movement of the valve assembly and allows the perpendicular movement of the valve assembly by the perpendicular movement mechanism, wherein the connecting mechanism has a rod arm fixed to the drive rod, a lever member fixed to the proximal end of the valve shaft, and a compression spring interposed between the lever member and the rod arm, wherein the parallel movement mechanism has a pair of left and right cam frames fixed to the rod arm so as to face the left side wall and the right side wall of the lever member, a guide groove formed in each cam frame in the parallel movement direction, and a plurality of guide rollers attached to each of a pair of left and right roller frames fixed to a bonnet to which the valve casing is attached, and fitted in the guide groove, and wherein the perpendicular movement mechanism has a plurality of cam grooves formed in each of the pair of cam frames, and a plurality of cam rollers provided on each of the left and right side surfaces of the lever member and fitted in the cam grooves; the cam grooves have, in the parallel movement direction, a beginning end position on the valve element side, a terminal end position on the opposite side thereto, and an intermediate position provided therebetween, and in the perpendicular movement direction, the intermediate position is provided closer to the first opening than the beginning end position, and the terminal end position is provided closer to the second opening than the beginning end position; and the cam rollers are disposed at the beginning end positions during the parallel movement in which the valve assembly is moved from the fully opening position to the facing position, the valve assembly occupies the first closing position when the cam rollers are moved to the intermediate positions, and the valve assembly occupies the second closing position when the cam rollers are moved to the terminal end positions. |
