发明名称 METHOD FOR FORMING PATTERN AND CATALYST AND ELECTRONIC ELEMENT USING METHOD THEREFOR
摘要 Provided are a method for forming a pattern, and a catalyst and an electronic element using the method. The method for forming a pattern comprises the steps of: preparing, on a surface, a substrate sequentially including a photoconductive material layer and an oxide layer; making an area, on which a pattern is to be formed, on the oxide layer of the substrate, come into contact with an electrolyte; connecting the substrate and the electrolyte to a first electrode and a second electrode connected to a power source, respectively; and selectively irradiating light from a light source to the electrolyte and applying a voltage to the first electrode or the second electrode, thereby directly forming the pattern on the oxide layer of the substrate.
申请公布号 WO2015005517(A1) 申请公布日期 2015.01.15
申请号 WO2013KR06658 申请日期 2013.07.25
申请人 SNU R&DB FOUNDATION 发明人 CHUNG, TAEK DONG;LIM, SUNG YUL
分类号 H01L21/027;H01L21/316 主分类号 H01L21/027
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