| 摘要 |
PROBLEM TO BE SOLVED: To use an electrode that is more inexpensive than Au.SOLUTION: A semiconductor device comprises: a first titanium layer formed of titanium, which is formed so as to cover at least a part of a semiconductor layer; an aluminum layer containing aluminum as a primary component, which is formed on the opposite side to the semiconductor layer with respect to the first titanium layer; a titanium nitride layer formed of titanium nitride, which is formed on the opposite side to the first titanium layer with respect to the aluminum layer; and an electrode layer formed of copper, which is formed on the opposite side to the aluminum layer with respect to the titanium nitride layer. |
