PATTERN CHARACTERISATION METHOD

摘要

A method of characterizing a pattern includes determining an image of the contour of the pattern to be characterized with an imagining instrumentation; processing the image, the processing including determining a plurality of points located along the contour and sampled according to a given sampling interval; for each point, identifying a point located on a reference contour and corresponding to the same sampling interval number and determining a dimensionless intermediate coefficient representative of the deviation between the point and the corresponding point on the reference contour; determining a final dimensionless coefficient on the basis of the set of intermediate coefficients corresponding to the plurality of points, the final coefficient being representative of the deviation between the contour of the pattern to be characterized and the reference contour.

主权项

1. A method of characterising a pattern comprising:
determining an image of a contour of the pattern to be characterised using imagery instrumentation; processing said image, said processing including determining a plurality of points located along said contour and sampled at a given sampling rate; for each point, identifying a point located on a reference contour and corresponding to a same sampling step number and determining an intermediate dimensionless coefficient representing a difference between said point and the corresponding point on said reference contour; determining a final dimensionless coefficient using all intermediate coefficients corresponding to said plurality of points, said final coefficient being representative of the difference between the contour of the pattern to be characterised and the reference contour.