| 发明名称 |
Radiation Source and Lithographic Apparatus |
| 摘要 |
The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation. |
| 申请公布号 |
US2015015863(A1) |
申请公布日期 |
2015.01.15 |
| 申请号 |
US201314383359 |
申请日期 |
2013.02.07 |
| 申请人 |
ASML Netherland B.V. |
发明人 |
Kempen Antonius Theodorus Wilhelmus;Dijkusman John Frederik;Meastrom Jan Jan |
| 分类号 |
H05G2/00;B05B17/06;G03F7/20 |
主分类号 |
H05G2/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator attached to said capillary, the method comprising analyzing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator. |
| 地址 |
Vedhoven NL |
