发明名称 POLISHING COMPOSITION AND METHOD FOR PRODUCING SAME
摘要 Provided is a polishing composition which enables the improvement in a polishing rate while rarely affecting the quality of a surface. Provided is a polishing composition comprising abrasive grains, water and a quaternary ammonium cation represented by general formula (A). [In the formula, R1, R2, R3 and R4 may be the same as or different from one another and independently represent an organic group, wherein at least one of R1, R2, R3 and R4 represents an organic group having 3 or more carbon atoms.]
申请公布号 WO2015005433(A1) 申请公布日期 2015.01.15
申请号 WO2014JP68443 申请日期 2014.07.10
申请人 FUJIMI INCORPORATED 发明人 TSUCHIYA, KOHSUKE;KAWASAKI, YUSUKE;IDE, SHOGAKU;TAKAHASHI, YOSUKE
分类号 C09K3/14;B24B37/00;H01L21/304 主分类号 C09K3/14
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