INTEGRATED CIRCUITS WITH ALIGNED (100) NMOS AND (110) PMOS FINFET SIDEWALL CHANNELS

摘要

An integrated circuit device that includes a plurality of multiple gate FinFETs (MuGFETs) is disclosed. Fins of different crystal orientations for PMOS and NMOS MuGFETs are formed through amorphization and crystal regrowth on a direct silicon bonded (DSB) hybrid orientation technology (HOT) substrate. PMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (110) crystal orientations. NMOS MuGFET fins are formed with channels defined by fin sidewall surfaces having (100) crystal orienations in a Manhattan layout with the sidewall channels of the different PMOS and NMOS MuGFETs aligned at 0° or 90° rotations.

主权项

1. An integrated circuit device, comprising:
a lower silicon layer having a top surface with a first crystal orientation; an upper silicon layer on the lower silicon layer having a first portion with a top surface of a second crystal orientation different from the first crystal orientation and a second portion with the top surface of the first crystal orientation; a first fin in the second portion of the upper substrate, the first fin having a top surface with a first crystal orientation and a sidewall surface with a second crystal orientation; and a second fin in the first portion of the upper substrate, the second fin having a top surface with the second crystal orientation and a sidewall surface with the first crystal orientation; the first fin sidewall surface defining a channel with a first carrier flow direction of a first FinFET, the second fin sidewall defining a channel with a second carrier flow direction of a second FinFET, and the second carrier flow direction being different than the first carrier flow direction.