发明名称 METHOD FOR FORMING PAD OF WAFER
摘要 The present invention relates to a technology for simply performing a process of forming a pad on the rear surface of a via hole in a packaging process in a process of forming a pad of a wafer. The present invention is characterized by a packaging process in a process for manufacturing a wafer, the packaging process comprising the steps of: attaching glass to the upper portion of a micro lens and then separating a handling wafer from an element wafer, thereby exposing metal layers formed on the element wafer to the outside; and forming pads for the metal layers.
申请公布号 WO2015005571(A1) 申请公布日期 2015.01.15
申请号 WO2014KR03828 申请日期 2014.04.30
申请人 SILICONFILE TECHNOLOGIES INC. 发明人 AHN, HEUI GYUN
分类号 H01L27/146;H01L21/60;H01L23/48;H01L23/488 主分类号 H01L27/146
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