发明名称 |
METHOD FOR FORMING PAD OF WAFER |
摘要 |
The present invention relates to a technology for simply performing a process of forming a pad on the rear surface of a via hole in a packaging process in a process of forming a pad of a wafer. The present invention is characterized by a packaging process in a process for manufacturing a wafer, the packaging process comprising the steps of: attaching glass to the upper portion of a micro lens and then separating a handling wafer from an element wafer, thereby exposing metal layers formed on the element wafer to the outside; and forming pads for the metal layers. |
申请公布号 |
WO2015005571(A1) |
申请公布日期 |
2015.01.15 |
申请号 |
WO2014KR03828 |
申请日期 |
2014.04.30 |
申请人 |
SILICONFILE TECHNOLOGIES INC. |
发明人 |
AHN, HEUI GYUN |
分类号 |
H01L27/146;H01L21/60;H01L23/48;H01L23/488 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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