发明名称 |
THREE DIMENSIONAL NAND DEVICE WITH BIRD'S BEAK CONTAINING FLOATING GATES AND METHOD OF MAKING THEREOF |
摘要 |
<p>A method of making a monolithic three dimensional NAND string including forming a stack of alternating layers of a first material and a second material over a substrate. The first material comprises an electrically insulating material and the second material comprises a semiconductor or conductor material. The method also includes etching the stack to form a front side opening in the stack, forming a blocking dielectric layer over the stack of alternating layers of a first material and a second material exposed in the front side opening, forming a semiconductor or metal charge storage layer over the blocking dielectric, forming a tunnel dielectric layer over the charge storage layer, forming a semiconductor channel layer over the tunnel dielectric layer, etching the stack to form a back side opening in the stack, removing at least a portion of the first material layers and portions of the blocking dielectric layer.</p> |
申请公布号 |
WO2015006152(A1) |
申请公布日期 |
2015.01.15 |
申请号 |
WO2014US45347 |
申请日期 |
2014.07.03 |
申请人 |
SANDISK TECHNOLOGIES, INC. |
发明人 |
CHIEN, HENRY;LEE, DONOVAN;PURAYATH, VINOD R.;ZHANG, YUAN;KAI, JAMES K.;MATAMIS, GEORGE |
分类号 |
H01L27/06;H01L27/115;H01L29/788;H01L29/792 |
主分类号 |
H01L27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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