发明名称 ABSOLUTE DISTANCE LASER INTERFEROMETER
摘要 A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
申请公布号 US2015019160(A1) 申请公布日期 2015.01.15
申请号 US201414284756 申请日期 2014.05.22
申请人 attocube Systems AG 发明人 Thurner Klaus;Karrai Khaled;Braun Pierre-Francois
分类号 G01B9/02;G01B11/00 主分类号 G01B9/02
代理机构 代理人
主权项 1. A device for absolute distance measurement, comprising: a first tunable light source configured to emit a first wavelength light of a first tunable frequency modulated by a first modulating frequency; a second light source configured to emit a second wavelength light of a second frequency modulated by a second modulating frequency; an optical coupler configured to couple the first wavelength light and the second wavelength light into an interferometer cavity; an interferometer detector coupled to the interferometer cavity and configured to provide an interference measurement signal based on interferometric first and second wavelength light; a demodulator unit configured to generate a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency; and a computation unit configured to compute an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
地址 Munich DE