| 摘要 |
This bonding stage is provided with: a rigid block (10) wherein a plurality of protrusions (11) are provided on a surface (16) thereof, said protrusions having flat upper surfaces, respectively; a flat board (20) that is fixed on supporting surfaces (18) on the protrusions (11); a ceramic board (30) that is fixed on the flat board (20) by being sucked; a board-like heater (40) that is disposed on the rigid block (10) side of the flat board (20); and a coil spring (50), which is provided between the heater (40) and the rigid block (10), and which has the heater (40) adhered on a flat board (20) surface on the rigid block (10) side. |
