METHOD FOR THE PERPENDICULAR ORIENTATION OF NANODOMAINS OF BLOCK COPOLYMERS, USING STATISTICAL OR GRADIENT COPOLYMERS, THE MONOMERS OF WHICH DIFFER AT LEAST IN PART FROM THOSE PRESENT IN EACH OF THE BLOCKS OF THE BLOCK COPOLYMER

摘要

A method for the perpendicular orientation of nanodomains of block copolymers, using statistical or gradient copolymers the monomers of which differ at least in part from the monomers present in each of the blocks of the block copolymer. The present invention relates to a method for the perpendicular orientation of nanodomains of block copolymers on a substrate, using an underlayer of statistical or gradient copolymers, the monomers of which differ at least in part from those present in each of the blocks of the block copolymers.