Vacuum pump

摘要

A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

主权项

1. A vacuum pump, comprising a working space (12), a bearing space (14), a dividing wall (16) arranged between the working space (12) and the bearing space (14), a blocking device for blocking between the working space (12) and the bearing space (14) and at least one rotor shaft (18), the rotor shaft extending through the dividing wall (16) and forming a gap (20) with the dividing wall (16), wherein the blocking device is formed by a Siegbahn pump stage (22), the Siegbahn pump stage being configured to provide a pump action between the working space (12) and the bearing space (14), with the pumping action passing through the gap (20).