MICRO-VISION ALIGNMENT SYSTEM WITH GUIDING RINGS FOR IC TESTING

摘要

A vision alignment system for an integrated circuit device testing handler includes a head guiding ring configured to be attached to a pick-and-place device, the head guiding ring having an opening in which a device-under-test having a device contact array is locatable; a socket apparatus including: a fixed mounting frame, a moveable socket guiding ring, and a plurality of actuators configured to move the moveable socket guiding ring relative to the fixed mounting frame; and a visualization device configured to provide data relating to a position of the device contact array relative to the contactor pin array. The socket apparatus is configured to adjust a position of the head guiding ring by moving the moveable socket guiding ring while the head guiding ring is located in an opening of the moveable socket guiding ring to align the device contact array to the contactor pin array.

主权项

1. A vision alignment system for an integrated circuit device testing handler, the system comprising:
a head guiding ring configured to be attached to a pick-and-place device, the head guiding ring having an opening in which a device-under-test having a device contact array is locatable; a socket apparatus comprising:
a fixed mounting frame having an opening in which a contactor pin array is locatable,a moveable socket guiding ring having an opening in which the head guiding ring is locatable, anda plurality of actuators configured to move the moveable socket guiding ring relative to the fixed mounting frame; and at least one visualization device configured to provide data relating to a position of the device contact array relative to the contactor pin array, wherein the socket apparatus is configured to adjust a position of the head guiding ring by moving the moveable socket guiding ring while the head guiding ring is located in the opening of the moveable socket guiding ring, the adjustment being based on data received from the at least one visualization device, to align the device contact array to the contactor pin array.