A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.
申请公布号
EP2742526(A4)
申请公布日期
2015.01.14
申请号
EP20120823926
申请日期
2012.08.13
申请人
ENTEGRIS, INC.
发明人
ADAMS, MICHAEL, S.;GREGERSON, BARRY;FULLER, MATTHEW, A.