| 摘要 |
<p>A process that includes: (a) introducing a vent gas comprising hydrochloric acid, silicon tetrachloride, trichlorosilane, and dichlorosilane to an HCl converter reactor comprising a metal catalyst, to provide a product gas comprising less hydrochloric acid than was present in the vent gas; (b) refining the product gas to provide a hydrogen enriched stream and a chlorosilane(s) enriched stream, and (c) introducing the chlorosilane(s) enriched stream into a TCS/STC distillation unit, to generate a fraction enriched in silicon tetrachloride and another fraction enriched in trichlorosilane and dichlorosilane.</p> |
