| 摘要 |
PROBLEM TO BE SOLVED: To provide, without having to add any new step to the manufacturing process, an electrostatic capacitance type acceleration sensor in which stiction is difficult to occur. SOLUTION: An acceleration sensor comprises: a supporting substrate 109; fixed electrodes 104 and 105 over the supporting substrate 109; springy beams 102 and 102 fixed to the supporting substrate 109 by fixed anchors 106 and 106; and, between the two beams 102, a mass part 111 having a movable electrode 103. When the mass part 111 is divided by a straight line r resulting from moving in parallel to the mass part 111 a virtual straight line connecting the two fixed anchors 106 to each other into a first mass portion 110 and a second mass portion 120, the masses of the first mass portion 110 and the second mass portion 120 are differentiated. COPYRIGHT: (C)2013,JPO&INPIT |
