发明名称 連続拡散処理装置
摘要 The invention provides a continuously diffusion processing device, which is capable of reducing energy loss and improving production efficiency and processing quality. The continuously diffusion processing device comprises: conveying benches (50) conveying a plate-shaped processed member; a cylindrical heating furnace (1) in a straight-shaped extension; a conveying device (2) conveying the conveying benches via pushing the conveying benches (50) into the heating furnace (1) one by one, and making the conveying benches (50) previously sent into the heating furnace (1) in a column movement in the heating furnace (1); a plurality of first bulkhead components (7) dividing a plurality of processing zones from a feeding opening (11) in the heating furnace (1) to the sending-out opening (12). The conveying device (2) makes the conveying benches (50) move intermittently with the processing zones as the unit. The conveying benches (50) are provided with a second bulkhead component (54) closing an opening (7c) of the first bulkhead component (7) and spacing apart adjacent processing zones.
申请公布号 JP5654796(B2) 申请公布日期 2015.01.14
申请号 JP20100163212 申请日期 2010.07.20
申请人 发明人
分类号 H01L21/22;F27B9/04;F27B9/26;H01L21/677 主分类号 H01L21/22
代理机构 代理人
主权项
地址