VERTICAL TYPE WAFER-TREATING TOOL

摘要

PROBLEM TO BE SOLVED: To provide a vertical-type wafer-treating tool for facilitating manufacture and handling by suppressing a crystal defect generated in a heat-treated wafer, and enhancing uniformity in a fluid such as atmosphere gas and a temperature and hence improving practicality and simplifying the shape. SOLUTION: In a vertical type wafer-treating tool where a plurality of posts are installed between a top 14 and a bottom plate 16, a plurality of grooves 20 for placing and fitting a wafer W are formed on the outer peripheral surface of the posts, and a plurality of wafers are retained at the groove for heat treatment, the posts are in cylindrical body where the inside is hollow and the groove is provided so that the outer periphery surface of the side wall of cylindrical posts 18 is penetrated to the inside hollow part.