| 发明名称 |
METHOD AND APPARATUS FOR FORMING A TRANSPARENT CONDUCTIVE OXIDE USING HYDROGEN |
| 摘要 |
<p>A method and apparatus for forming a crystalline cadmium stannate layer of a photovoltaic device by heating an amorphous layer in the presence of hydrogen gas.</p> |
| 申请公布号 |
EP2823081(A1) |
申请公布日期 |
2015.01.14 |
| 申请号 |
EP20130710242 |
申请日期 |
2013.03.04 |
| 申请人 |
FIRST SOLAR, INC |
发明人 |
SHAO, RUI;ZHAO, ZHIBO;GLOECKLER, MARKUS;HWANG, DAVID;BULLER, BENYAMIN |
| 分类号 |
C23C14/08;C23C14/58;H01L31/0296;H01L31/0392;H01L31/073 |
主分类号 |
C23C14/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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