发明名称 EMBEDDED STRUCTURES FOR PACKAGE-ON-PACKAGE ARCHITECTURE
摘要 Electronic assemblies including substrates and their manufacture are described. One assembly includes a die embedded in a dielectric layer in a multilayer substrate, and a dielectric region embedded in the dielectric layer in the multilayer substrate. The multilayer substrate includes a die side and a land side, with the first dielectric region and the dielectric layer extending to the die side. A plurality of vias are positioned within the first dielectric region, the vias extending to pads on the die side. Other embodiments are described and claimed.
申请公布号 US2015014861(A1) 申请公布日期 2015.01.15
申请号 US201414501003 申请日期 2014.09.29
申请人 INTEL CORPORATION 发明人 TEH Weng Hong;RAGHUNATHAN Vinodhkumar
分类号 H01L21/768;H01L23/00 主分类号 H01L21/768
代理机构 代理人
主权项 1. A method comprising: providing a coreless carrier; forming a plurality of metal pad regions on the coreless carrier; forming a first dielectric layer on the coreless carrier and on the metal pad regions; patterning the first dielectric layer to form a dielectric region that covers the metal pad regions and to form a cavity that exposes the coreless carrier, the cavity sized to accept a die; positioning a die in the cavity; forming openings through the dielectric region to expose a surface of the metal pad regions; depositing a metal in the openings; and forming a second dielectric layer on the die and on the dielectric region, so that the die and the dielectric region are embedded in the second dielectric layer.
地址 Santa Clara CA US