| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine particle sensor having a new structure capable of suppressing increase in the size thereof. SOLUTION: A fine particle sensor comprises: a conductive casing; and a discharge electrode for generating ions by corona discharge with the casing being a counter electrode. The casing has a nozzle forming member for forming a nozzle opening. The fine particle sensor further comprises: a separating electrode for generating a repulsive force between ions; and a first ceramic member which is disposed between the nozzle forming member and the separating electrode and insulates the nozzle forming member and the separating electrode. COPYRIGHT: (C)2013,JPO&INPIT |
