| 摘要 |
PROBLEM TO BE SOLVED: To easily and positively eliminate a deposit at the tip of a probe and to prevent particles from occurring by sticking the probe into a cleaner layer where a support material is dispersed into a base being made of rubber. SOLUTION: A main chuck is driven and a probe needle 17A is stuck into a cleaner layer 4 by approximately 100μm. On sticking, for example, dust being adhered to a probe tip lightly is stripped off by rubber 2 for constituting the cleaner layer 4 and is adhered and absorbed by a skin coating film 2A and the inside. A deposit O at the probe tip remains at the probe tip and enters the cleaner layer 4. However, the probe tip enters while in contact with particles in the rubber 2 and the deposit O is scraped off by the rubber 2 and the particles 3. After that, when a main chuck descends and the probe tip is pulled out of the cleaner layer 4, the deposit O is completely scraped off by the rubber 2 and the particles 3 and is pinched due to the elasticity of the rubber 2, and then the deposit O is completely eliminated from the probe tip being pulled out of the cleaner layer 4.
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