| 摘要 |
<p>PROBLEM TO BE SOLVED: To miniaturize a wafer attitude adjusting device which is one of the constituting devices of a semiconductor manufacturing device. SOLUTION: In this device, a first elevation cylinder 20 which is extensible vertically is provided at the lower part of a cassette-receiving stage for receiving a wafer cassette, and a second elevation cylinder 22 which is extensible up and down is attached to the first elevation cylinder 20, and an attitude- adjustment unit 7 for the attitude of the wafer is attached to the second elevation cylinder 22, so that the attitude-adjustment unit 7 can be inserted or into or retracted from the wafer cassette on the cassette-receiving stage according to a cooperative operation between the first elevation cylinder 20 and the second elevation cylinder 22. In this case, the attitude adjustment unit 7 can be elevated according to the two expanding and retracting operation of the first elevation cylinder 20 and the second elevation cylinder 22, and elevation necessary for the attitude-adjustment unit 7 can be performed by the two stage cylinders.</p> |
