| 摘要 |
<p>A system to deposit an organic material is disclosed. A system to form an organic electroluminescent element while moving a rectangular substrate includes: a plurality of transfer module chambers which are spaced apart from each other to be consecutively arranged; a buffer chamber which connects the transfer module chambers adjacent to each other; a long-axis scan process module chamber connected to a part of the transfer module chambers which moves along a long side from one short side of the rectangular substrate to the other short side to be provided with a first linear organic material deposition source such that an organic material is deposited on the surface of the rectangular substrate; and a short-axis scan process module chamber connected to a part of the transfer module chambers which moves along a short side from one long side of the rectangular substrate to the other long side to be provided with a second linear organic material deposition source such that the organic material is deposited on the surface of the rectangular substrate.</p> |
