发明名称 FIN-TYPE FIELD EFFECT TRANSISTOR AND METHOD OF FABRICATING THE SAME
摘要 <p>A fin-type field effect transistor includes a first fin which includes a first source, a first drain, and a first channel. The fin-type field effect transistor includes a second fin which includes a second source, a second drain, and a second channel. The fin-type field effect transistor includes a first semiconductor region under the first fin and a second semiconductor region under the second fin. A first reaction region is adjacent to the first semiconductor region, but a second reaction region is adjacent to the second semiconductor region. The first reaction region has a first dimension to induce a first strain in the first channel. A second reaction region has a second dimension to induce a second strain in the second channel. The first strain is practically equal to the second strain. A method of manufacturing a preferable fin-type field effect transistor is provided.</p>
申请公布号 KR20150005414(A) 申请公布日期 2015.01.14
申请号 KR20130150442 申请日期 2013.12.05
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHING KUO CHENG;WANG CHIH HAO;WU ZHIQIANG;DIAZ CARLOS H.;COLINGE JEAN PIERRE
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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