发明名称 金属膜形成方法および装置
摘要 A metal film-forming method is capable of forming a metal film on a surface of a base metal film, formed on a surface of a substrate, with sufficient adhesion to the base metal film even when a natural oxide film is formed on the surface of the base metal film. The metal film-forming method includes: preparing a substrate having a base metal film formed on a surface; and carrying out electroplating of the substrate using the base metal film as a cathode and another metal as an anode while immersing the substrate in a solution containing a metal complex and a reducing material, both dissolved in a solvent, to form a metal film, deriving from a metal contained in the metal complex, on the surface of the base metal film.
申请公布号 JP5653743(B2) 申请公布日期 2015.01.14
申请号 JP20100284120 申请日期 2010.12.21
申请人 发明人
分类号 C25D3/38;C25D5/34;C25D7/00;H05K3/38 主分类号 C25D3/38
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