| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramics heater having a long product life, in which airtightness of a joint part is enhanced, the airtightness is maintained for a long time, the inside of a reaction chamber is not contaminated and in addition, a heater element is not ruptured. SOLUTION: In a ceramics heater in which an alumina board 3 and an alumina coated sheet 5 are equipped, a recessed groove 2 is provided on a joint surface of either the alumina board 3 or the alumina coated sheet 5, a heater element 4 of a silicon carbide sintered body which is sintered without adding addition agent and has sintered density of not less than 2.8 kg/cm and an electric resistance of not more than 1Ω×cm under a room temperature, is loaded in the groove 2, the alumina board 3 and the alumina coated sheet 5 airtightly jointed by vitreous cement which as a main ingredient has aluminum boro- silicate containing SiO2 for not less than 75 wt.%, B2 O3 for not less than 10 wt. %, Al2 O3 for not more than 10 wt.%, and Na2 O and K2 O for not more than 5 wt.%, as a total. |
